Environmentally Friendly Development of Photoresists in Silicone Fluids
نویسندگان
چکیده
The chemical waste generated in today’s microelectronic fabrication processes has driven the need to develop a more environmentally benign process. Silicone fluids are linear methyl siloxanes that are non-toxic, not ozonedepleting and can be easily recycled. They are used as environmentally friendly alternatives in this study to develop conventional photoresists. After silylation, two conventional photoresists, poly(hydroxystyrene-costyrene-co-t-butylacrylate (ESCAP) and poly(4-t-butoxycarbonyloxystyrene) (PBOCST) have been successfully developed in silicone fluids, with features as small as 100 nm.
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